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脉冲Alexandrite 紫外激光器（PAL-PRO-UV）
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PAL/PRO-UV
features
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Tunability across the UV including 193 nm ArF and 248 nm KrF wavelengths
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All solid-state simplicity and reliability
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Spectral linewidths < 30 MHz in the fundamental and below 25 fm (0.025 pm) at 193 nm
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Continuous, all-electronic high resolution wavelength scanning over 10's of GHz
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Repetition rates of 10-30 Hz
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Single Longitudinal Mode (SLM) output
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Wavelength stability of < 300 MHz/day
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Gaussian or "Top Hat" spatial output with M2 measurements < 1.3
- Modularity for easy upgrades and service using reliable, proven 101 PAL™ laser modules
- Revolutionary DLIS and ACLS technology
All solid-state tunable alexandrite lasers can be frequency doubled, tripled or quadrupled to produce tunable light at most ultraviolet wavelengths. The outputs of our standard PAL™ laser systems and our PAL/PRO™ narrow-band ring laser systems are simply and conveniently frequency tripled and quadrupled to produce 248 nm and 193 nm pulses, coincident in wavelength with KrF and ArF excimer laser pulses. At these wavelengths typical pulse energies range from 1 to 30 mJ from oscillator-only systems. The nominal Q-switched pulse duration is 100 ns but can be varied from 30 ns to 200 ns.*
In many applications pulses having either smooth gaussian or flat "top hat" spatial profiles are preferred as are longer pulses having narrower spectral bandwidth.
Light Age has developed advanced laser technology and new products that provide output in the UV (and in other spectral regions) with unprecedented control of wavelength and spectral bandwidth. These new laser products incorporate the tunable solid-state laser innovations and new laser tuning technologies, diode laser injection seeding (DLIS) and activity cavity length stabilization (ACLS), invented and developed by Light Age scientists. Commercial laser systems now are available that produce light having bandwidths as narrow as 10 femtometers (0.01 pm).
Diode Laser Injection Seeding (DLIS) is a revolutionary new way to control the frequency of a tunable laser. The DLIS system works by injecting photons from an external cavity diode laser, or other narrowband cw laser source having the proper spectral characteristics, into the resonator of a pulsed laser. This injection is done by a unique light coupling system. The ACLS system fires the pulsed laser when its cavity length exactly matches the frequency of the injected light. The laser pulse builds up by preferentially amplifying the injected photons over its own spontaneous emission. When this is done correctly essentially all of the light of the pulsed laser is produced at the frequency of the injected light. As a result nearly ideal single longitudinal mode (SLM) output is generated. Moreover, since this technique does not require lossy elements to be introduced into the pulsed laser's cavity there is no reduction of laser efficiency or output power, and there are no sensitive frequency control elements (e.g., etalons or gratings) to heat up and drift. The high power pulsed laser output can then be controlled, stabilized or tuned as readily and accurately as the cw injection source.
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